SEMI Beijing 8-inch MEMS international foundry line starts volume production！

On June 10, 2021, Beijing SEMI., Ltd. and the National IC Industry Investment Fund jointly invested in the "8-inch MEMS international foundry line" (Beijing FAB3) of Silex Microsystems Technology (Beijing) Co. started volume production formally. Dr. Yang Yunchun, Chairman and General Manager of SEMI, went to Beijing FAB3 to witness and congratulate the engineer team.

 Chairman Yang Yunchun holds an 8-inch MEMS silicon wafer produced by Silex Beijing FAB3

       The first chip successfully volume produced by Beijing FAB3 is a MEMS microphone chip from General Micro (Shenzhen) Technology Co Ltd (GMEMS), which has high signal-to-noise ratio and high AOP characteristics, and is consistent with the performance of the same type of chip it has been OEMed by FAB in Sweden. The performance of the MEMS microphone based on this chip package is comparable to that of similar products from internationally renowned sensor companies such as Knowles Electronics and Infineon. After rigorous wafer-level performance tests conducted by GMEMS, as well as performance testing and reliability verification of the MEMS microphone, it was confirmed that the performance of the finished product met the design specifications and was consistent with the key performance of the MEMS microphone based on the chip package manufactured by FAB in Sweden. The first wafers manufactured by Beijing FAB3 are at the same yield level as Swedish FAB1&2 and are ready for volume commercial production.

 Real GMEMS silicon microphone chip under microscope (1.05*1.05 mm)

       GMEMS is a leading global supplier of MEMS sensing chips. Its technical team is led by Dr. Yunlong Wang, the pioneer of acoustic MEMS sensors in China, and has been rooted in acoustic MEMS for nearly two decades. GMEMS gathers the world's leading experts in acoustic processing algorithms and sensing chips, combining the development of acoustic micro-sensors with artificial intelligence-based algorithms and software, starting from acoustic principles and integrating MEMS sensing chips, algorithms, and digital signal processors or microprocessors, opening up the whole industry chain from sensing chips to modules, solving the core challenges of wake-up, low-power standby, and the cocktail party effect in voice interaction.  The MEMS chip developed by GMEMS has been volume produced in China for the first time, filling the most critical and important link for the establishment of a complete domestic supply chain system.

 Real GMEMS silicon microphone under the microscope (2.75x1.85x0.98mm)

       In recent years, in the complex international political and economic environment, the small chip has pulled at the hearts of billions compatriots; it has not only triggered a nationwide discussion and reflection, awakening the whole society's respect and esteem for science and craftsmanship, but also inspired a group of Chinese sons and daughters to join the semiconductor industry, one step at a time, and continue to struggle hard to break the bottleneck of this field. Among the many busy and hard-working figures, SEMI is one of those who have been working in silence and advancing step by step.

       In May 2015, SEMI was listed on the GEM IPO; in August of the same year, the company launched the acquisition of Silex Sweden.

       In July 2016, SEMI completed the acquisition of Silex Sweden; in November of the same year, the company launched a fixed-term investment and invested in the Beijing FAB3 production line in joint venture with the National Fund.

       In September 2017, SEMI financed RMB700 millions through a entrusted loan, all of which was invested in the construction of the Beijing FAB3 production line (later returned in May 2019).

       In February 2019, SEMI completed the financing of RMB1.207 billions by way of fixed increase, all of which was invested in the construction of the Beijing FAB3 production line.

       In December 2019, SEMI Beijing FAB3 moved into its first equipment.

       In September 2020, SEMI Beijing FAB3 line was put in use.

       In June 2021, SEMI Beijing FAB3 was completed and formally started volume production.

       Adversity makes one stronger, just as polishing makes jade finer. There are no shortcuts on the road to success. From a piece of wasteland to a brand new factory, with the belief that "those who win are powerful and those who win are strong", SEMI overcame difficulties in talent, technology, process, equipment, research and development, management, capital and other aspects and finally made its dream come true. Of course, from concept to reality, it is inseparable from the strong support of all shareholders, the firm trust of our partners, and the unremitting efforts of all staff; at the same time, it is also inseparable from the leaders, departments and grassroots units at all levels of the central government, Beijing and the Economic Development Zone to support SEMI and Silex Beijing.

      Chairman Yang Yunchun once lamented that the outbreak of COVID-19, which began in 2020, had been effectively controlled under the strong prevention, control and management of the Party and the government, and had made achievements that had attracted world attention and set an example for the world, and the nation was carrying heartfelt pride and joy. However, in terms of the semiconductor industry, especially in terms of key technologies and key equipment manufacturing, China is still subject to constraints everywhere. One wonders what kind of era this is. This is a time when our semiconductor industry is being "necked"; this is a time when the domestic semiconductor industry is blossoming and competing; this is a time when opportunities and challenges coexist and infinite possibilities abound. Our products, technologies and processes have no national boundaries; our reform and open-up and internationalization direction will not change; our determination to cooperate with global outstanding enterprises and teams, to serve the human destiny community together will not waver. We need to maintain our determination, do our own thing, iterate quickly, close the gap and serve the industry, the whole society and humanity.

       SEMI, with its semiconductor business as its core, facing the era of Internet of Things and artificial intelligence in the context of high-frequency communication, focuses on developing MEMS process and wafer manufacturing business on the one hand, and actively laying out GaN materials and devices business on the other, aiming to become a well-known semiconductor technology enterprise group based on local and international development.

      Based on the judgment of the global market demand prospect and the domestic industry chain situation, after the wholly-owned acquisition of Sweden Silex in 2016, SEMI actively introduced the national integrated circuit industry fund, through the independent establishment of domestic production lines, digestion and absorption of international leading technology, through controlled research and development and production, training first-class comprehensive MEMS engineering team,to build a global technology-leading MEMS production line and industrialization platform, to further establish industry technology barriers and enhance the company's core competitiveness.

 Design rendering of the 8-inch MEMS international foundry line in Beijing

      The volume production of Beijing FAB3 will enable the SEMI to have an advanced and high quality 8-inch MEMS production line in both Stockholm, Sweden and Beijing, China, while Beijing FAB3 can provide standardized scale capacity, which is conducive to the company's further expansion into the global market, especially the Asian market, combining advanced technology and scale capacity to better serve downstream customers, while continuing to expand the competitive advantage of the company's MEMS business and maintaining its leading position in the MEMS pure foundry field worldwide.

       Official volume production of the 8-inch MEMS international foundry line in Beijing is an important milestone achieved by the hard work of SEMI over the past six years, and it is also a key turning point and starting point for SEMI to move from a "boutique factory" to a "volume production factory" for MEMS. SEMI welcomes the cooperation with global and especially Chinese MEMS design companies in various fields to contribute itself to the independent development of China's MEMS industry.

Real view of the completed 8-inch MEMS international foundry line in Beijing