On the afternoon of June 14, 2017, the signing ceremony of the joint laboratory of the Institute of Microelectronics of the Chinese Academy of Sciences and Japan's Aphaco Group was grandly held in the conference room of the Institute of Microelectronics of the Chinese Academy of Sciences. Ye Tianchun, director of the Institute of Microelectronics of the Chinese Academy of Sciences, Liu Xinyu, deputy director, Wang Wenwu, director of the Institute, and Kori Kori, executive officer of the Afa Group, executive officer, executive officer, Ichigo Saito, and chief of the office, Zou Honggang, more than 50 people attended and witnessed the signing ceremony, including leaders such as yang bingjun, general manager of aipac (Suzhou) technology research and development co., ltd. and experts from various enterprises in the semiconductor field, including Beijing neway technology, goer acoustics co., ltd., SMIC, Shanghai huahong hongli, China resources microelectronics, zhongke micro-electromechanical technology, zhongke hantianxia, huajin semiconductor packaging co.
ULVAC Co., Ltd. is a research and development integrated enterprise based on vacuum technology which is widely used in various fields and with the goal of creating fine processing technology. Its products range from FPD, electronic semiconductors, vacuum equipment for solar cells to standard parts, materials and vacuum coatings. At present, 15 companies have been set up in China, and the investment in China will continue to expand in the future. In the broad fields of energy, environmental protection, transportation, medicine, food, chemical industry, biological engineering and so on, led by electronic technology and communication technology, ULVAC Co., Ltd. takes equipment production as the center, provides advanced vacuum technology products, high-quality and perfect services, and constantly meets the needs of customers.
Director Ye Tianchun's Speech
The joint laboratory was set up this time. The two sides used the technologies related to microelectronic devices owned by the Chinese Academy of Sciences Microelectronics and the technologies related to vacuum coating equipment and process technology owned by Afiko Group to jointly develop the development themes in the fields of MEMS, memory, power devices and sensors, and assisted each other in striving for their practicality. The two sides agreed that the two sides have a very strong complementary relationship, which is the best way to give full play to their respective strengths, realize the seamless connection of industry, university and research, and meet the needs of core technology research and industrialization at the same time. The two sides will set up a joint laboratory to carry out in-depth cooperation in resource sharing, technology development, talent exchange and training, so as to support and promote the research and accumulation of relevant core technologies. The joint laboratory will become a window for cooperation between the two sides and an experimental base for new technological scientific research results.
Joint Laboratory will use ULVAC to manufacture SME-200 sputtering equipment to carry out microelectronic process development. ULVAC SME-200 equipment is a multifunctional sputtering equipment, which can carry up to eight chambers and can deposit advanced materials such as metal, oxide and nitride thin films on 8inch Si substrates for research and development and a small amount of production purposes, the equipment can realize the functions of automatic transportation, automatic data storage, and ensuring the stability of process results. Through the use of this equipment, the two parties will cooperate in process research and development in the fields of MEMS, memory, power devices and sensors.
Xiao Ri Delivered a Speech to President Jiuzhi
The establishment of the Joint Laboratory reflects Afa Ke Group's strategic policy of vigorously promoting localization industry. Cooperate with the Institute of Microelectronics of the Chinese Academy of Sciences to improve R & D strength, accelerate the industrialization of cutting-edge technology, and implement the two-wheel drive strategy of talents and scientific and technological innovation in view of China's vigorously developing electronic semiconductor industry. to provide a platform for domestic semiconductor enterprises to provide technical support and process verification.
The signing ceremony was a complete success. We look forward to the positive progress of the cooperation between Afiko Group and the Institute of Microelectronics of the Chinese Academy of Sciences, which will promote the leapfrog development of China's semiconductor MEMS sensor technology.
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