Silex Helps Silicon Technology to Achieve Mass Production of Six-Axis IMU Chips

Recently, Silex Microsystems (hereinafter referred to as "Silex"), a wholly-owned subsidiary of Neville Technology, and Silex Technology (hereinafter referred to as "QST") have achieved phased results in their in-depth cooperation, successfully helping them to realize batch casting, product verification and mass production of multiple batches of Wafer Lots of MEMS wafers with six-axis inertial sensor (IMU) chips.

Single-die 6-Axis MEMS with TSV technology

QST IMU device is the first in the industry to adopt through-silicon via (TSV) technology, which vacuum bonds the thick monocrystalline silicon movable structure layer between the TSV layer and the cover layer. Compared with other inertial sensor technologies, it has stronger potential to reduce size. QST MEMS's unique manufacturing process enables dual-pressure chambers and superior single-mass gyroscope/accelerometer designs to improve reliability and reduce the size and cost of MEMS sensing elements while achieving the lowest noise in consumer IMU products.

As a MEMS sensor company with its own core technology, Silicon Technology is the first in China to achieve mass production of six-axis IMU chips, and has shipped more than one million chips by the end of September 2019.

In response to the success of this cooperation, Silex CEO Dr. Edvard Kä lvesten said: "As a pure MEMS generation factory, Silex has mature TSV and other process technologies and advanced manufacturing equipment. We are very happy to cooperate deeply with QST to jointly promote the mass production of six-axis IMU products. In addition to continuing additional investment in the 8-inch MEMS fab in Sweden, Silex's new MEMS 8-inch Fab in Yizhuang, Beijing is also under construction at full speed, and we look forward to providing stronger support to more strategic partners like QST." Sun Zhen, CEO of Siri Technology, said: "The market demand for six-axis IMU chips is very strong and growing rapidly, especially in the Asia-Pacific and Chinese markets where the consumer electronics industry is developing rapidly. QST's consumer-grade six-axis IMU chip has a competitive advantage in performance such as low noise. So far, QST's IMU MEMS design has been mass-produced in several MEMS fabs. It is believed that the success of MEMS process optimization and mass production has provided further guarantee for QST's large-scale market promotion of IMU sensor products." Introduction to

Six-axis IMU Chip QMI8610:

6-axis IMU QMI8610

QST QMI8610 integrates a 3-axis gyroscope and a 3-axis accelerometer. It is a complete 6D MEMS inertial measurement unit (IMU). This product is widely used in the fields of balance vehicles, pan-tilt, unmanned aerial vehicles, smart phones, wearable, robots and other consumer electronic products. Since its release and promotion in May last year, it has been widely recognized by customers.

Sweden Silex was established in 2000, long-term focus on MEMS chip process development and wafer manufacturing, with the world's advanced pure MEMS foundry process and growing foundry capacity. Since 2012, Silex has remained in the first echelon of MEMS wafer foundry in the world. In the 2018 ranking of global MEMS wafer manufacturers, Sweden Silex continues to rank second among pure manufacturers and fourth among manufacturers, and ranks among the top five in the world along with STMicroelectronics, TELEDYNE DALSA, SONY and TSMC.